The LabRAM Odyssey Semiconductor system includes a 300 mm × 300 mm automated sample stage and an automated objective turret, enabling the acquisition of maps of full wafers of diameter up of 300 mm. In addition, the DuoScan imaging function permits both variable size laser macrospot for full wafer maps and high spatial submicron step scanning for small area maps. The range of available excitation lasers, combined with a wide range of spectral detection, from deep UV to near IR, makes the LabRAM Odyssey Semiconductor system a two-in-one Raman and Photoluminescence spectroscopy tool. The “Tilt at midway” autofocus function overcomes possible sample/holder tilt and ensures reliability in uniformity response.
As Raman and Photoluminescence characterisation is moving from the lab to the fab for the emerging 2D materials-based devices, the LabRAM Odyssey Semiconductor system is the perfect tool for metrology technical managers.