Scanning Electron Microscope (SEM), the most widely used platform technology in Nano- Metrology of Nano-scale. SEM is the precision instrument, can be used for analyzing the shapes or constituents of microstructure materials in quantitative and qualitative. SEM is an essential instrument for development of basic science and an indispensable infra for technical innovation, used in chemistry, biology, material science as well as nano-materials and nano-biology.
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