Analytical Technologies Singapore

Megasonic cleaning employs ultrasonic energy at a significantly higher frequency within the megahertz range, effectively enhancing the removal of submicron particles from substrates and facilitating chemical reactions

Megasonic Spray System

Shower Type Megasonic Nozzle

Shower type megasonic nozzle sprays the liquid with sound energy onto the substrate such as wafer.

Batch Type Megasonic Plate

Can be easily assembled into process tank to build a batch type megasonic cleaning system for wafers.

Cover Type Megasonic Unit

Has the advantages of both batch type and shower type megasonic cleaning and removes the drawbacks of both types.