Analytical Technologies Singapore


Horiba Debuts new Raman Microscope for Semiconductor Analyses

HORIBA is pleased to introduce the latest addition to its repertoire, the LabRAM Odyssey Semiconductor system. This pioneering Raman/Photoluminescence microscope derives its foundation from the widely acclaimed LabRAM HR Evolution Confocal Raman Microscope, renowned for its exceptional high resolution capabilities. Noteworthy enhancements include the integration of a sample mounting stage adept at accommodating the prevalent 300 mm wafer size, catering directly to the semiconductor industry’s standard requirements.
As compound semiconductors are becoming more complex with a higher number of elements, uniformity assessment on blanket wafers is essential for high quality devices and high yield. The LabRAM Odyssey Semiconductor system will help process engineers qualify the different process steps in a timely manner and with a high level of confidence. With a high spatial resolution mode, the LabRAM Odyssey Semiconductor offers the capability to detect and identify defects and submicron inhomogeneities to understand and give insights about their origin.

The LabRAM Odyssey Semiconductor system includes a 300 mm × 300 mm automated sample stage and an automated objective turret, enabling the acquisition of maps of full wafers of diameter up of 300 mm.  In addition, the DuoScan imaging function permits both variable size laser macrospot for full wafer maps and high spatial submicron step scanning for small area maps.  The range of available excitation lasers, combined with a wide range of spectral detection, from deep UV to near IR, makes the LabRAM Odyssey Semiconductor system a two-in-one Raman and Photoluminescence spectroscopy tool. The “Tilt at midway” autofocus function overcomes possible sample/holder tilt and ensures reliability in uniformity response.

As Raman and Photoluminescence characterisation is moving from the lab to the fab for the emerging 2D materials-based devices, the LabRAM Odyssey Semiconductor system is the perfect tool for metrology technical managers.

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NanoRaman Set up with Bioptentiostat for Tip Enhanced Raman Spectroscopy (TERS) Application

The NanoRaman system equipped with LabRAM Evolution being installed locally by Analytical Technologies’ in-house team.

LabRAM Evolution, the world renowned Raman solution for research and analysis. The integral flexibility of the LabRAM HR Evolution makes it the ideal platform for combined with the fully integral nano-Raman for research to TERS (tip enhanced Raman scattering).  

Raman Microscope

A close up of the integration of a customised environmental chamber and electrochemical cell within a NanoRaman (as shown above) setup designed a sophisticated and versatile experimental configuration to enhance the capabilities of this analytical instrument.

This integrated system is further augmented by the inclusion of a bipotentiostat, a critical component for conducting Tip Enhanced Raman Spectroscopy (TERS) experiments.  

Personalised hands-on guidance and training provided by a HORIBA’s application scientist represents a valuable and tailored educational experience designed to empower researchers, technicians, and users with the skills and knowledge required to make the most effective use of HORIBA’s instruments. 

Another angle of the HORIBA’s LabRAM HR Evolution Setup before the integration of NanoRaman, with HORIBA’s in-house software installed in the computer (right). 

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Raman microscopy applied to Polymer characterisation

In the polymer field, Raman microscopy has become one of the most important characterization tools due to the large number of chemical and structural information which could be extracted from a single result. Thus, Raman microscopy can help from raw material characterization to genuine product
control, from synthesis process to defect investigation, covering the whole process of polymers manufacturing.

Continue reading the rest of the article from HORIBA here

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What is a Confocal Raman microscopy?

What is a confocal Raman microscope?

A Raman microscope is a combination of a Raman spectrometer with a standard microscope, allowing high magnification visualisation of a sample and Raman analysis with a microscopic laser spot. 

However, just adding a microscope to a Raman spectrometer does not give a controlled sampling volume – for this a spatial filter is required.  Confocal Raman microscopy refers to the ability to spatially filter the analysis volume of the sample, in the XY (lateral) and Z (depth) axes.
The Raman microscope allows the Raman microscopy to be performed with microscopic spatial resolution:
  • Analysis and identification of individual particles with dimensions down to 0.5 µm.
  • Characterisation of sample features with dimensions down to 0.5 µm.
  • Location and identification of microscopic contaminants.
  • Raman mapping (imaging) of sample features to show the distribution of components, with a spatial resolution down to 0.5 µm.

Are all Raman microscopes confocal?

Some Raman microscopes do not have confocal optics. Adding a microscope only assists in giving lateral (XY) spatial resolution, but does not provide depth (Z) spatial resolution. For this confocal optics are required. Several methods are in use today (i.e. true confocal aperture, or pseudo confocal slit-binning techniques) with some are better than others. However, only by using a true confocal Raman microscope, it is then possible to analyse individual particles or layers with dimensions as low as 1 µm and below. 

For a true confocal design, the limits of spatial resolution are defined principally by the laser wavelength and quality of the laser beam used, and the type of microscope objective selected and so on. For the highest spatial resolution, a correctly matched high magnification objective and visible laser excitation will often produce optimum results. Typical spatial resolution is in the order of 0.5-1 µm.

Can a Raman microscope be used for depth profiling & analysis of features below the surface?

Yes.  A confocal Raman microscope can be used to analyse features below the sample surface provided the sample matrix is transparent to the laser.  Typical examples of such analyses include fluid/gas inclusions, contaminants in glass, and layered polymer structures.

On a basic system, manual focusing requires locating the required position within the sample, followed by spectral analysis.  If the Raman microscope is equipped with motorised Z (focus) control, then it is possible to acquire depth (Z) profiles through the sample automatically. 

Such a profile comprises a full Raman spectrum at each and every depth within the profile, and is then interrogated to generate intensity profiles based on material composition and structure:

  • Raman peak intensity yields a profile of material concentration and distribution
  • Raman peak position yields a profile of molecular structure and phase and material stress/strain
  • Raman peak width yields a profile of crystallinity and phase
  • A system which has additional XY motorised sample control can be used to optically slice through the sample, for example, to create an XZ or YZ Raman spectral image.

A system which has additional XY motorised sample control can be used to optically slice through the sample, for example, to create an XZ or YZ Raman spectral image.

Confocal Raman microscopy with other techniques

​Confocal Raman microscopy can be combined with numerous other techniques to attains a more comprehensive understanding of the sample.


TERS (Tip Enhanced Raman Spectroscopy) brings Raman spectroscopy into nanoscale resolution Imaging. TERS is a super-resolution chemical technique. Better yet, it is a label- free super-resolution imaging technique which has been extended by our novel technology into an important new imaging technology.

TERS imaging is performed with an AFM/Raman system, where a Scanning Probe microscope (SPM that can be used in atomic force, scanning tunneling, or normal/shear force mode) is integrated with a confocal Raman spectrometer through an opto-mechanical coupling. The scanning probe microscope allows for nanoscale imaging, the optical coupling brings the excitation laser to the functionalized tip (or probe), and the spectrometer analyzes the Raman (or otherwise scattered) light providing a hyperspectral image with nanometer scale chemical contrast.


Transmission Raman Spectroscopy (or TRS) is a form of Raman analysis which is ideally suited for bulk analysis of opaque/turbid materials. Transmission Raman is based on the collection of Raman light propagating through the sample in the direction of the excitation laser – in essence, the sample is illuminated with the excitation laser from one side, and the Raman signal is collected from the other.

Despite the sample being opaque, light from the laser can pass through the sample via light scattering processes. Many of these photons contain Raman information, and thus Transmission Raman spectroscopy is possible.

Unlike traditional Raman spectrometers and microscope systems, the transmission geometry allows true bulk analysis from the entire volume of the sample (for example, a pharmaceutical tablet).

Transmission Raman is non-contact, non-invasive and non-destructive. It requires no sample preparation. Importantly, the measurement is insensitive to particle size effects, sample homogeneity and orientation.
Transmission Raman spectroscopy can be used to understand:
  • API concentration
  • Content uniformity
  • Polymorphism
  • Crystallinity
  • Powder composition and purity
  • Solid form


Resonance Raman spectroscopy is a variant of ‘normal’ Raman spectroscopy. ‘Normal’ Raman spectroscopy uses laser excitation at any wavelength to measure the Raman scattering of this laser light.

Notwithstanding the many practical issues caused by the use of different laser wavelengths, the end result will be very similar to whatever wavelength is used.

In resonance Raman, the excitation wavelength is carefully chosen to overlap with (or be very close to) an electronic transition – this typically means in an area of UV-visible absorption. Such overlap can result in scattering intensities which are increased by factors of 102-106 – thus, detection limits and measurement times can be significantly improved. However, since the excitation coincides with UV-visible absorption, fluorescence backgrounds can be significant and more problematic than with ‘normal’ Raman scattering.

An alternative approach is Surface Enhanced Raman Scattering (SERS), which offers a similar order of magnitude increases in intensity. The advantage of SERS over resonance Raman is that fluorescence is suppressed while the Raman is enhanced, thus removing the fluorescence background problem of resonance Raman.

For certain specific applications, the benefits of resonance Raman can be powerful. One such example is the use of resonance Raman for the analysis of environmental pollutants, where concentrations in the parts per billion (ppb) and parts per million (ppm) range can be detected.

Practically, resonance Raman can be explored on any Raman system, and the actual measurement is made in the standard way. The obvious requirement is to have suitable laser excitation in order to meet resonance conditions.

Find out more about our Raman Spectrometers & microscopes here.

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Structural characterization of WS2 flakes by Photoluminescence and ultra-low frequency Raman spectroscopy on a unique multimode platform

2D materials are best characterised using both Photoluminescence (PL) & ultra-low frequency Raman spectroscopy. PL is most appropriate for band structures characterisation at the micron scale.  Additionally, Raman analysis very close to the laser line, allowing a precise characterisation of the number of layers of 2D materials as specific interlayer vibration modes are excited in the ultra-low spectral Raman range (< 50ms-1). Click below as we explore the application of the two techniques using one of the 2D materials, WS2 flakes. 

​By definition, photoluminescence is the most appropriate technique for band structures characterisation at the micron scale. Indeed, the luminescence band of a semiconductor informs directly about the bandgap energy. 

Furthermore, the Raman analysis very close to the laser line allows a precise characterisation of the number of layers of a 2D material. Indeed, specific interlayer vibration modes are excited in this spectral range. Being able to have both spectroscopy techniques, photoluminescence and ultra-low frequency Raman on the same instrument is a vital feature to characterise these materials as much as possible. 

Continue reading the rest of the article from HORIBA here.

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What is co-localised AFM/RAMAN?

Raman and AFM (Atomic Force Microscope) analysis can be combined on a single microscope system, opening interesting new capabilities and providing enhanced information on sample composition and structure by collecting physical and chemical information on the same sample area. Co-localized AFM/Raman measurement is the sequential or simultaneous acquisition of overlapped SPM (Scanning Probe Microscope) and Raman maps with pixel-to-pixel correspondence in the images.

On one hand, AFM and other SPM techniques like STM, Shear-Force or Normal-Force, provide topographic, mechanical, thermal, electrical, and magnetic properties down to the molecular resolution (~ nm, over μm2 area), on the other hand, confocal Raman spectroscopy and imaging provides specific chemical information about the material, with a diffraction-limited spatial resolution (sub-micron).

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